Wafer Re-Mounter (MA3000III + Frame removal unit) NEL SYSTEM™ series

This equipment is full-auto type Wafer Re-mounter for 300mm wafer, first removes the frame from wafer-mount-frame by support tape, and next mounts the wafer on the new frame by dicing tape, and removes the support tape from the wafer

First removes the frame from wafer-mount-frame by support tape And next mounts the wafer on the new frame by dicing tape, and removes the support tape from the wafer

MA3000III+ Frame removal unit

Wafer Remounter

"Full-auto Wafer Remounter for 300mm wafer (MA3000III + Frame removal unit)"

Operation flow

Features

• Bump wafer available
• Thin wafer available
• Available as normal Wafer Mounter
• Wafer transfer robot with flip function
• Easy operation by Touch panel & Recipe function
• Log file function standard equipment
• Adding Wafer mapping scanner available (For Normal Wafer Mounter)
• Adding SECS/GEM available
• Follow to CE mark / SEMI S2/S8

Basic spesifications

• Applicable frame size：　300mm
• Applicable wafer size：　300mm
• Applicable wafer thickness：　100um or more
• Throughput：　Frame removal unit：App.30wafers／hr.　MA3000III: Roll tape: 40wafers/hr.   Pre-cut tape: 45wafers/hr.

*Above spec. values will be influenced by wafer/tape/other conditions, and in several cases, the option function is included.
In the case the conditions are appropriate, the wafers out of above spec. could be applicable. Please contact us.